| Name:Carbon Tetrafluoride | |||||||
| Tetrafluoromethane (R14) | |||||||
| PFC 14 | |||||||
| CAS:75-73-0 | |||||||
| UN1982 | |||||||
| WM:88.00 | |||||||
| EC NO.:200-896-5 | |||||||
| Molecular Formula: CF4 | |||||||
| Main Application | |||||||
| Two main grades: Industries and electronics.In semiconductor manufacturing, CF4 in | |||||||
| mixture with oxygen is used for plasma cleaning of CVD reactors.Halocarbon 14 is a | |||||||
| selective etching agent for many metals, metal silicides and oxides. | |||||||
