Air Preparation Filters
Clean Air Module LLB
・Modularized clean equipment (Reduced piping labor/Space saving) Makes clean air easily available ・Nominal filtration rating: 0.01 μm (Filtration efficiency 99.99%) ・Wetted parts: Grease-free, Silicone-free ・Assembled in a clean room, Shipped and packed in double packaging ・24 combinations are available. Note) Inlet air conditions ISO 8573-1 Quality grade: Equivalent to 1.4.1 to 1.6.1 |
| Series | Fluid | Set pressure | Flow range L/min (ANR) |
|---|---|---|---|
| LLB3 | Clean air N2 gas Note) | 0.05 to 0.4MPa | 5 to 100 |
| LLB4 | Clean air N2 gas Note) | 0.05 to 0.4MPa | 50 to 500 |
