CAS NO.:75-73-0
MW:88
EC NO.:200-896-5
Formula: CF4
InChI: InChI=1/CF4/c2-1(3,4)5
Item Unit Zhongli Fluoridation Standard
CF4 purity % ≥99.9 ≥99.99 ≥99.999
N2 PPm(v/v) ≤300 ≤25 ≤3.0
02 PPm(v/v) ≤100 ≤20 ≤1.5
H2O ug/g ≤10 ≤2.0 ≤1.0
CO PPm(v/v) ≤50 ≤10 ≤1.0
CO2 PPm(v/v) ≤50 ≤10 ≤1.0
HF ug/g ≤3.0 ≤3.0 ≤0.2
F-C PPm(v/v) ≤350 ≤20 ≤2.0
SF6 PPm(v/v) ≤50 ≤10 ≤0.3
