| Name:CarbonTetrafluoride | |||||||
| Tetrafluoromethane(R14) | |||||||
| PFC14 | |||||||
| CAS:75-73-0 | |||||||
| UN1982 | |||||||
| WM:88.00 | |||||||
| ECNO.:200-896-5 | |||||||
| MolecularFormula:CF4 | |||||||
| MainApplication | |||||||
| Twomaingrades:Industriesandelectronics.Insemiconductormanufacturing,CF4in | |||||||
| mixturewithoxygenisusedforplasmacleaningofCVDreactors.Halocarbon14isa | |||||||
| selectiveetchingagentformanymetals,metalsilicidesandoxides. | |||||||

